A Platform for Nanomaterial-Enhanced Gas Sensing using Magnetomotive MEMS
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Institution
http://id.loc.gov/authorities/names/n79058482
Degree Level
Master's
Degree
Master of Science
Department
Department of Electrical and Computer Engineering
Specialization
Microsystems and Nanodevices
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Abstract
We present a platform for research into nanomaterial-enhanced gas sensing using magnetomotive MEMS resonators. A microfabrication process fl ow is developed and carried out to create metallized silicon MEMS resonators. In tandem, a test system based around a balanced electronic bridge is constructed to perform full electrical characterization of our devices, both in atmosphere, and at vacuum. An innovative fine-tuning circuit allows this apparatus to be built at low-cost. Initial results, compared with predictions from modelling, reveal that our system works as intended, but further optimization of our devices is required to achieve the best possible performance.
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http://purl.org/coar/resource_type/c_46ec
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This thesis is made available by the University of Alberta Libraries with permission of the copyright owner solely for non-commercial purposes. This thesis, or any portion thereof, may not otherwise be copied or reproduced without the written consent of the copyright owner, except to the extent permitted by Canadian copyright law.
Language
en