Stress-free ultra-hard NEMS cantilevers fabricated from atomically-smooth Ni-Mo nanocomposite thin films
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Institution
http://id.loc.gov/authorities/names/n79058482
Degree Level
Doctoral
Degree
Doctor of Philosophy
Department
Department of Mechanical Engineering
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Abstract
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http://purl.org/coar/resource_type/c_46ec
Alternative
NEMS cantilevers from Ni-Mo thin films
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This thesis is made available by the University of Alberta Libraries with permission of the copyright owner solely for the purpose of private, scholarly or scientific research. This thesis, or any portion thereof, may not otherwise be copied or reproduced without the written consent of the copyright owner, except to the extent permitted by Canadian copyright law.
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en