Developing a platform for Low Temperature Superconducting Electromechanics

Abstract

This thesis lays out the work required to design and create a platform for cryogenically compatible testing of on-chip microwave resonators, intended as a platform for quantum-limited electromechanical torque sensing. We have created a platform with less than 8 dB loss across an operating range of up to 12 GHz, the widest band we can measure with current equipment. We then used this platform to measure on-chip resonators with quality factors greater than 50, 000, competitive with state-of-the-art devices for which the development and fabrication is also described. We also lay out the necessary theory to design high-quality electromechanical sensors and describe a straightforward path to their creation.