Development of silicon carbonitride nanomechanical resonators for biological detection applications
| dc.contributor.author | Fischer, Lee M | |
| dc.date.accessioned | 2025-05-29T11:09:44Z | |
| dc.date.available | 2025-05-29T11:09:44Z | |
| dc.date.issued | 2007 | |
| dc.identifier.doi | https://doi.org/10.7939/r3-r7aq-cx56 | |
| dc.language.iso | en | |
| dc.rights | This thesis is made available by the University of Alberta Libraries with permission of the copyright owner solely for the purpose of private, scholarly or scientific research. This thesis, or any portion thereof, may not otherwise be copied or reproduced without the written consent of the copyright owner, except to the extent permitted by Canadian copyright law. | |
| dc.subject | Resonators. | |
| dc.subject | Nanoelectromechanical systems. | |
| dc.subject | Biosensors. | |
| dc.title | Development of silicon carbonitride nanomechanical resonators for biological detection applications | |
| dc.type | http://purl.org/coar/resource_type/c_46ec | |
| thesis.degree.grantor | http://id.loc.gov/authorities/names/n79058482 | |
| thesis.degree.level | Master's | |
| thesis.degree.name | Master of Science | |
| ual.date.graduation | 2007 | |
| ual.department | Department of Electrical and Computer Engineering | |
| ual.jupiterAccess | http://terms.library.ualberta.ca/public |
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